Best Top Reviews Online

Huawei’s EUV Scanner Patent Suggests China’s Sub-7nm Chips

Huawei has filed for a patent covering EUV scanners.

UDN reports that Huawei has filed a patent application for an extreme ultraviolet (EUV) lithography scanner. If the company constructs such a scanner and achieves adequate productivity, uptime, and yields, Chinese chipmakers will be able to manufacture chips utilizing sub-7nm-class technologies. When is the only question?

In Mid-November, Huawei applied for a patent covering a EUV scanner and its essential components with the State Intellectual Property Office. MyDrivers reports that the patent application number is 202110524685X.

The patent application appears to cover all essential components of a EUV scanner, including a 13.5 nm EUV light generator (light source), a set of reflecting mirrors, the lithography system, and ‘control management technologies’ (we assume this is how they refer to metrology).

Filing a patent is not the same as being able to construct a EUV scanner, which is a highly complex machine with numerous cutting-edge components that must operate flawlessly and for extended periods. In addition, even with a EUV tool at their disposal, chipmakers still need to determine the optimal pellicles for masks, resists, and a variety of other elements required for high-volume production.

A 0.33 numerical aperture EUV scanner is the pinnacle of modern semiconductor production equipment. After over ten years of development and with financial support from Intel, Samsung, and TSMC, only ASML was able to create such a device, despite the efforts of numerous other companies. Currently, Samsung, SK Hynix, and TSMC use EUV tools from ASML, whereas Intel has yet to begin high-volume chip production with these tools.

Only Intel, Micron, Samsung, SK Hynix, and TSMC currently employ or intend to employ EUV scanners. In addition, only these five companies have developed (or intend to develop) process technologies advanced enough to make use of EUV scanners. Due to the Wassenaar arrangement, SMIC, based in China, was unable to acquire a EUV tool already acquired to create its EUV-based fabrication process. Therefore, it is evident that potential demand for EUV scanners exists in China, and Huawei was eager to meet it.

Huawei, a world-class high-tech conglomerate with approximately $100 billion in annual revenue, pursues various objectives and develops a vast array of technologies. The company’s semiconductor production goals are well-known, and they include both chip production and wafer fab equipment construction. As evidenced by the company’s patent application for a EUV scanner, Huawei’s WFE initiatives are progressing quite well.

Why Trust Us?

Best Top Reviews Online was established in 2018 to provide our readers with detailed, truthful, and impartial advice on what to buy. We now have millions of monthly users from all over the world and annually evaluate over a thousand products.

The above article was written by the BestTopReviewsOnline team, which consists of some of the most knowledgeable technical experts in the United States. Our team consists of highly regarded writers with vast experience in smartphones, computer components, technology apps, security, and photography, among other fields.

Related Stories

  • All Post
  • Best Picks
  • Explainers
  • How To
  • News
  • Versus

Get more info



Best Products

Buying Guides

Contact Us

About Us

We provide a platform for our customers to rate and review services and products, as well as the stores that sell them. We research and compare the most popular brands and models before narrowing it down to the top ten, providing you with the most comprehensive and reliable buying advice to help you make your decision.

Disclaimer is a participant in the Amazon Services LLC Associates Program, an affiliate advertising program designed to provide a means for sites to earn advertising fees by advertising and linking to As an Amazon Associate I earn from qualifying purchases.


Address & Map

20 S Santa Cruz Ave, Suite 300, Los Gatos, CA 95030, United States

© 2022 Pty. Ltd. All Rights Reserved. Licensing: All third-party trademarks, images, and copyrights used on this page are for comparative advertising, criticism, or review. As this is a public forum where users can express their opinions on specific products and businesses, the opinions expressed do not reflect those of